Thermodynamic simulation of the CVD process in the system Ni–Si–C–H
- Authors: Shestakov V.A.1, Kosinova M.L.1
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Affiliations:
- Nikolaev Institute of Inorganic Chemistry, Siberian Branch, Russian Academy of Sciences
- Issue: Vol 69, No 1 (2024)
- Pages: 43-48
- Section: ФИЗИКО-ХИМИЧЕСКИЙ АНАЛИЗ НЕОРГАНИЧЕСКИХ СИСТЕМ
- URL: https://ruspoj.com/0044-457X/article/view/665996
- DOI: https://doi.org/10.31857/S0044457X24010059
- EDN: https://elibrary.ru/ZZSXIQ
- ID: 665996
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