Investigation of the spatial distribution of deformations in quartz piezo elements by x-ray topography
- Authors: Ibragimov E.S.1,2, Pilyak F.S.1,2, Kulikov A.G.1,2, Marchenkov N.V.1,2, Pisarevsky Y.V.1,2, Kaloyan A.A.2, Pershin Y.A.3, Glazunova Y.A.3, Demin S.A.3, Yuzhalkin A.S.3, Pashkov S.S.3, Cherpukhina G.N.3
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Affiliations:
- Shubnikov Institute of Crystallography FSRC "Crystallography and photonics" RAS
- NRC "Kurchatov Institute"
- JSC "Lit-Fonon"
- Issue: Vol 70, No 3 (2024)
- Pages: 58-66
- Section: ФИЗИЧЕСКАЯ АКУСТИКА
- URL: https://ruspoj.com/0320-7919/article/view/648404
- DOI: https://doi.org/10.31857/S0320791924030065
- EDN: https://elibrary.ru/ZMNHTE
- ID: 648404
Cite item
Abstract
Using X-ray topography on laboratory and synchrotron X-ray sources, the distribution of deformations in the volume of two types of AT-cut quartz resonators of different sizes were obtained. From a comparison of X-ray data and the amplitude-frequency characteristics of the resonators, a correlation between the deformation patterns and the features of oscillatory processes for operating modes and their harmonics, as well as for parasitic modes, was established. A connection between oscillations in parasitic modes, which manifest themselves in the amplitude inhomogeneity, and the topology of the resonators is found. The applied significance of the obtained results for the development and optimization of new designs of piezoelectric elements and the development of their manufacturing technology is noted.
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About the authors
E. S. Ibragimov
Shubnikov Institute of Crystallography FSRC "Crystallography and photonics" RAS; NRC "Kurchatov Institute"
Email: ontonic@gmail.com
Russian Federation, 119333 Moscow, Leninskiy pr-kt 59; 123182 Moscow, Academician Kurchatov Sq. 1
F. S. Pilyak
Shubnikov Institute of Crystallography FSRC "Crystallography and photonics" RAS; NRC "Kurchatov Institute"
Email: ontonic@gmail.com
Russian Federation, 119333 Moscow, Leninskiy pr-kt 59; 123182 Moscow, Academician Kurchatov Sq. 1
A. G. Kulikov
Shubnikov Institute of Crystallography FSRC "Crystallography and photonics" RAS; NRC "Kurchatov Institute"
Author for correspondence.
Email: ontonic@gmail.com
Russian Federation, 119333 Moscow, Leninskiy pr-kt 59; 123182 Moscow, Academician Kurchatov Sq. 1
N. V. Marchenkov
Shubnikov Institute of Crystallography FSRC "Crystallography and photonics" RAS; NRC "Kurchatov Institute"
Email: ontonic@gmail.com
Russian Federation, 119333 Moscow, Leninskiy pr-kt 59; 123182 Moscow, Academician Kurchatov Sq. 1
Y. V. Pisarevsky
Shubnikov Institute of Crystallography FSRC "Crystallography and photonics" RAS; NRC "Kurchatov Institute"
Email: ontonic@gmail.com
Russian Federation, 119333 Moscow, Leninskiy pr-kt 59; 123182 Moscow, Academician Kurchatov Sq. 1
A. A. Kaloyan
NRC "Kurchatov Institute"
Email: ontonic@gmail.com
Russian Federation, 123182 Moscow, Academician Kurchatov Pl. 1
Y. A. Pershin
JSC "Lit-Fonon"
Email: ontonic@gmail.com
Russian Federation, 107076 Moscow, Krasnobogatyrskaya str. 44, bld. 1
Y. A. Glazunova
JSC "Lit-Fonon"
Email: ontonic@gmail.com
Russian Federation, 107076 Moscow, Krasnobogatyrskaya str. 44, bld. 1
S. A. Demin
JSC "Lit-Fonon"
Email: ontonic@gmail.com
Russian Federation, 107076 Moscow, Krasnobogatyrskaya str. 44, bld. 1
A. S. Yuzhalkin
JSC "Lit-Fonon"
Email: ontonic@gmail.com
Russian Federation, 107076 Moscow, Krasnobogatyrskaya str. 44, bld. 1
S. S. Pashkov
JSC "Lit-Fonon"
Email: ontonic@gmail.com
Russian Federation, 107076 Moscow, Krasnobogatyrskaya str. 44, bld. 1
G. N. Cherpukhina
JSC "Lit-Fonon"
Email: ontonic@gmail.com
Russian Federation, 107076 Moscow, Krasnobogatyrskaya str. 44, bld. 1
References
- Смагин А.Г., Ярославский М.И. Пьезоэлектричество кварца и кварцевые резонаторы. М.: Энергия, 1970. 488 с.
- Мостяев В.А., Дюжиков В.И. Технология пьезо- и акустоэлектронных устройств. М.: Ягуар, 1993. 280 с.
- Савицкий О.А. Резонатор с управляемой прозрачностью границ // Акуст. журн. 2022. T. 68. № 4. С. 385–390. doi: 10.31857/S0320791922040104
- Туральчук П.А., Вендик И.Б. Синтез полосовых фильтров на объемных акустических волнах с учетом материальных параметров многослойной структуры резонаторов // Акуст. журн. 2022. T. 68. № 6. С. 611–617. doi: 10.31857/S0320791922050124
- Квашнин Г.М., Сорокин Б.П., Бурков С.И. Анализ распространения СВЧ волн Лэмба в пьезоэлектрической слоистой структуре на основе алмаза // Акуст. журн. 2021. T. 67. № 6. С. 595–602. doi: 10.31857/S0320791921060058
- Onoe M., Kamada K., Okazak M., Tajika F., Manabe N. 4 MHz AT-Cut Strip Resonator for Wrist Watch / Proc. of the 31st Annual Symposium on Frequency Control. New Jercey: IEEE, 1977. Р. 48–54. https://doi.org/10.1109/FREQ.1977.200128
- Zumsteg A.E., Suda P. Properties of a 4 MHZ miniature flat rectangular quartz resonator vibrating in a coupled mode / Proc. of the 30th Annual Symposium on Frequency Control. New Jercey: IEEE, 1976. Р. 196–201. https://doi.org/10.1109/FREQ.1976.201314
- Okano S., Kudama T., Yamazaki K., Kotake H. 4.19 MHZ Cylindrical AT-cut Miniature Resonator / Proc. of the 35th Annual Symposium on Frequency Control. New Jercey: IEEE, 1981. P. 166–173. https://doi.org/10.1109/FREQ.1981.200471
- Dvorsky L. AT-quartz strip resonatore / Proc. of the 41st Annual Symposium on Frequency Control. New Jercey: IEEE, 1987. P. 295−302. https://doi.org/10.1109/FREQ.1987.201037
- Mindlin R.D. High frequency vibrations of plated crystal plates // Intl. J. Solids and Struct. 1972. V. 8. P. 891–906. https://doi.org/10.1016/0020-7683(72)90004-2
- Lee P.C. Extensional, Flexural and Width-Shear Vibrations of Thin Rectangular Crystal Plates / Proc. of the 25th Annual Symposium on Frequency Control. New Jercey: IEEE, 1971. P. 63−69. https://doi.org/10.1109/FREQ.1971.199834
- Zumsteg A.E., Suda P., Zingg W. Energy trapping of coupled modes in rectangular AT-cut resonators / Proc. of the 32nd Annual Symposium on Frequency Control. New Jercey: IEEE, 1978. P. 260–266. https://doi.org/10.1109/FREQ.1978.200246
- Андросова В.Г. и др. Пьезоэлектрические резонаторы: справочник. Под ред. Кандыбы П.Е. и Позднякова П.Г. М.: Радио и связь, 1992. 392 с.
- Букштам Б.М., Караульник А.Е. Акустические колебания кварцевых резонаторов среза AT // Акуст. журн. 1983. Т. 29. № 4. С. 440–445.
- Куликов А.Г., Марченков Н.В., Благов А.Е., Кожемякин К.Г., Насонов М.Ю., Пашков С.С., Писаревский Ю.В., Черпухина Г.Н. Рентгенотопографические исследования кварцевых резонаторов с «тройным» электродом // Акуст. журн. 2016. T. 62. № 6. С. 675−680. https://doi.org/10.7868/S0320791916050087
- Mkrtchyan A.R., Blagov A.E., Kocharyan V.R., Kulikov A.G., Movsisyan A.E., Muradyan T.R., Targonsky A.V., Eliovich Ya.A., Darinski A.N., Pisarevski Yu.V., Kovalchuk M.V. Distribution of Deformations in the Oscillating X-Ray Acoustic Element Based on the X-Cut Quartz Crystal // J. Contemp. Phys. 2019. V. 54. № 2. P. 210–218. https://doi.org/10.3103/S1068337219020142
- Snegirev N., Lyubutin I., Kulikov A., Zolotov D., Vasiliev A., Lyubutina M., Yagupov S., Mogilenec Yu., Seleznyova K., Strugatsky M. Structural perfection of Fe1-xGaxBO3 single crystals designed for nuclear resonant synchrotron experiments // J. Alloys and Compounds. 2022. V. 889. P. 161702. https://doi.org/10.1016/j.jallcom.2021.161702
- Buzanov O.A., Kozlova N.S., Kozlova A.P., Zabelina E.V., Blagov A.E., Eliovich I.A., Kulikov A.G., Targonskiy A.V. Crystal growth and optical properties of Ca3TaGa3Si2O14 single crystals // Japan. J. Appl. Phys. 2018. V. 57. № 11S. P. 11UD08. https://doi.org/10.7567/JJAP.57.11UD08
- Kulikov A., Blagov A., Marchenkov N., Targonsky A., Eliovich Ya., Pisarevsky Yu., Kovalchuk M. LiNbO3-based bimorph piezoactuator for fast X-Ray experiments: Static and quasistatic modes // Sensors and Actuators A: Physical. 2019. V. 291. P. 68−74. https://doi.org/10.1016/j.sna.2019.03.041
- Marchenkov N., Kulikov A., Targonsky A., Eliovich Ya., Pisarevsky Yu., Seregin A., Blagov A., Kovalchuk M. LiNbO3-based bimorph piezoactuator for fast X-Ray experiments: Resonant mode // Sensors and Actuators A: Physical. 2019. V. 293. P. 48−55. https://doi.org/10.1016/j.sna.2019.04.028
- Bechmann R. Elastic and Piezoelectric Constants of Alpha-Quartz // Phys. Rev. 1958. V. 110. № 5. P. 1060–1061. https://doi.org/10.1103/PhysRev.110.1060
- Lang A.R. Topography / International Tables for Crystallography. 2006. Vol. C. Ch. 2.7. P. 113–123. https://doi.org/10.1107/97809553602060000582
- Bowen D.K., Tanner B.K. High Resolution X-Ray Diffractometry and Topography. London: Taylor & Francis, 1998. 252 p.
- Sykes R.A. Modes of Motion in Quartz Crystals, the Effects of Coupling and Methods of Design // Bell System Technical Journal. 1944. V. 23. P. 52–96.
- Резонаторы пьезоэлектрические кварцевые РК319 (ВП) аЦ0.338.105ТУ.
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