STUDY OF ELECTROCHEMICAL SYNTHESIS FEATURES OF CNTS THIN FILMS ON TITANIUM AND TANTALUM FOIL SUBSTRATES
- Authors: Rakitin V.V.1, Feoktistova L.S.2, Gapanovich M.V.1,2, Stanchik A.V.3, Sedlovets D.M.4
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Affiliations:
- Federal Research Center of Problems of Chemical Physics and Medicinal Chemistry RAS
- Department of Fundamental Physical and Chemical Engineering, M. V. Lomonosov Moscow State University
- Scientific-Practical Materials Research Centre, National Academy of Sciences of Belarus
- Institute of Microelectronics Technology and High Purity Materials, RAS
- Issue: Vol 59, No 12 (2023)
- Pages: 884-893
- Section: Articles
- URL: https://ruspoj.com/0424-8570/article/view/671894
- DOI: https://doi.org/10.31857/S0424857023120101
- EDN: https://elibrary.ru/QAVVXY
- ID: 671894
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