SYNTHESIS OF TiN-Cu NANOCOMPOSITE COATINGS BASED ON THE PRINCIPLE OF COUPLING PROCESSES OF VACUUM-ARC EVAPORATION, MAGNETRON SPUTTERING AND ION BEAM SPUTTERING

Superhard TiN-Cu composite coatings have been obtained, the synthesis of which is based on the principle of coupling the operating modes of a vacuum arc evaporator a planar magnetron and a plasma ion source. The constitution, structure and properties of TiN-Cu composite coating do not depend on the type of hybrid methods of their synthesis. It is shown that the coatings have a characteristic homogeneous globular structure with crystallite sizes in the range of 20-50 nm and are textured along the plane (111). Copper does not form its own crystalline phase and is not in the crystal lattice of other phases, it is located at the boundaries of crystallites in an amorphous or X-ray amorphous state. The copper content throughout the coating profile is 5-10 at.%. The microhardness of the coatings is 38-42 GPa.